| 摘要 |
PURPOSE:To make it possible to accurately detect a rotating angle at a low cost without noise superimposition by obtaining high-reliability connections between electrodes in a piezoelectric element. CONSTITUTION:In a piezoelectric element for an oscillating wave motor, a signal conducting metal film 16a containing no glass component is provided and connected between adjacent electrodes 10 which are polarized in opposite direction each other. Also, in the production method of this motor, the electrodes 10 are formed by printing with metal paste using glass as binding material on a piezoelectric element plate in the process A including processes B and C, the electrodes 10 are polarized and treated in process E, metal paste using a resin as binding material is applied to the process G, and the signal conducting metal film 16a containing no glass component is formed by metal vapor deposition or spattering. |
