| 摘要 |
PURPOSE:To reduce cost and to improve temperature characteristic of a differential pressure transducer by providing a pressure receiving part including an excessive pressure protection diaphragm for absorbing excessive pressure. CONSTITUTION:Pressure is transmitted to seal diaphragms 11, 12 of a pressure receiving part that receives pressure of a higher pressure side as well as a lower pressure side, by a transmission part comprising capillary tubes 21, 22. A capillary tube made of stainless of inner diameter of approximately 0.44mm, for example, can be used for the tubes 21, 22, and silicon oil of viscosity of approximately 10cSt, for example, is sealed in the tube as a pressure medium 23. By selecting the tube inner diameter of the tubes 21, 22 or the viscosity of the pressure medium 23, responsibility is set in various modes. A semiconductor pressure sensor 31 is stored in a constant temperature case 32. The pressure difference in a positive pressure side or a negative pressure side transmitted by the pressure transmission part (tubes 21, 22) is detected by the semiconductor pressure sensor 31. The cost of a differential transducer can thus be reduced, while the temperature characteristic can be improved. |
