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发明名称
EXPOSURE APPARATUS
摘要
申请公布号
EP0503595(A3)
申请公布日期
1992.11.25
申请号
EP19920104183
申请日期
1992.03.11
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
NISHIWAKI, SEIJI;ASADA, JUNICHI;UCHIDA, SHINJI
分类号
G02B5/00;G02B5/18;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):G03F7/20
主分类号
G02B5/00
代理机构
代理人
主权项
地址
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