| 摘要 |
<p>PURPOSE:To decrease equipment cost and to improve the reliability of an operating system by providing one valve each for the gas inlet and outlet to a holding tank when separating gaseous impurities from a gaseous mixture using plural adsorption tanks and a holding tank. CONSTITUTION:When separating gaseous impurities from a gaseous composition by using at least three adsorption tanks 1, 2, 3,... having an adsorption bed and a holding tank 6 of filling order maintained type, adsorption and desorption are repeated alternately and periodically by pressurizing and depressurizing each of adsorption tanks 1, 2, 3,... then by which gas separation efficiency is increased by using the holding tank 6 as an intermediate gasholder. At this time, valves 73, 39 are only installed in the gas inlet and outlet to the holding tank 6 respectively, and the quantity of purge gas in purging and equalizing speed of each of the adsorption tanks 1, 2, 3,... are controlled by the degree of opening of the valves 73, 93. Therefore, because of less number of valves being enough, equipment cost can be decreased and failure probability of valves can be decreased by their decreased number.</p> |
