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发明名称
MEASURING EQUIPMENT FOR PLASMA
摘要
申请公布号
JPH04338663(A)
申请公布日期
1992.11.25
申请号
JP19910139570
申请日期
1991.05.15
申请人
TOKYO ELECTRON LTD
发明人
KOSHIMIZU CHISHIO
分类号
H01L21/66;H05H1/00
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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