Process of producing aluminum nitride multiple-layer circuit board.

摘要

A process of producing a multiple-layer circuit board of aluminum nitride, comprising the steps of: preparing green sheets of aluminum nitride, forming on the green sheets conductor patterns of a conductor paste containing tungsten as a main conductor component, laminating the green sheets with the conductor patterns formed thereon to form a lamination, and firing the lamination in a container made of boron nitride and in a pressurized nitrogen gas atmosphere.