| 摘要 |
PURPOSE:To cover a component with a hard film having liquid repellency by a method wherein after introducing a hydroxyl group and a carbonyl group onto a surface of a hard carbon film formed by a plasma chemistry gas phase growth method by an oxygen plasma treatment, it is processed with a fluorine- containing alkylsilane compound. CONSTITUTION:A hard carbon film 3 is formed on a surface of a substrate 1 by a plasma chemistry gas phase growth method in an atmosphere having hydrocarbon gas as main component. Then, by exposing to the atmosphere after plasma processing by oxygen, a hydroxyl group and a carbonyl group are introduced onto a surface of the hard carbon film 3. Further, when nitrogen gas having passed through a fluorine-containing alkylsilane compound is made to flow at 80 deg.C temperature of the substrate for 15min, dehydrating condensation reaction on the hydroxyl group or the carbonyl group on the hard carbon film 3 is generated, and polysiloxane bond is produced. A monomolecular layer 4 consisting of perfluoroalkyl group of 5mm thickness chemically bonded to the surface of the film is formed. At that time, critical surface tension of the surface decreases to show excellent water repellency and excellent oil repellency.
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