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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04335524(A)
申请公布日期
1992.11.24
申请号
JP19910135485
申请日期
1991.05.10
申请人
SANKEN ELECTRIC CO LTD
发明人
NAKAI TATSUJI
分类号
H01L21/28;H01L21/306
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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