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发明名称
FABRICATION OF THIN FILM TRANSISTOR
摘要
申请公布号
JPH04336468(A)
申请公布日期
1992.11.24
申请号
JP19910107852
申请日期
1991.05.14
申请人
FUJITSU LTD
发明人
TAKEI MICHIKO;MISHIMA YASUYOSHI
分类号
H01L21/205;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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