METHOD AND APPARATUS FOR INSPECTING SURFACE PATTERN OF OBJECT,申请号US19910686352-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR INSPECTING SURFACE PATTERN OF OBJECT
摘要
申请公布号	US5166985(A)	申请公布日期	1992.11.24
申请号	US19910686352	申请日期	1991.04.17
申请人	HITACHI, LTD.	发明人	TAKAGI, YUJI;HATA, SEIJI
分类号	G01B11/24;G01N21/88;G01N21/956	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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