发明名称 BONDING DEVICE
摘要 PURPOSE:To simplify a structure, to reduce its cost, to reduce its size and to always suppress vibrations in Z and X-Y directions. CONSTITUTION:A dynamic vibration absorber 15 has a body 16 formed with a weight shaft mounting hole in which a weight shaft 18 is inserted, and the weight shaft 18 mounted in the hole of the body 16 through an O-ring. The body 16 is secured to a torch arm 5 mounted on a bonding head 2.
申请公布号 JPH04335541(A) 申请公布日期 1992.11.24
申请号 JP19910135601 申请日期 1991.05.11
申请人 SHINKAWA LTD 发明人 SUZUKI KOJI
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址