PLASMA PROCESSING APPARATUS,申请号JP19910135231-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS
摘要
申请公布号	JPH04336423(A)	申请公布日期	1992.11.24
申请号	JP19910135231	申请日期	1991.05.13
申请人	SONY CORP	发明人	KAMIIDE KOYO
分类号	C23F4/00;H01L21/28;H01L21/285;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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