发明名称
摘要 PURPOSE:To enable a specified area with specific crystal direction of a specific element to be easily found and observed by installing devices for converting the amplitude of the vibration of the image on the display screen resulting from the rocking of electron rays into the distance on the sample surface and then displaying the conversion result. CONSTITUTION:An input device 20 is operated to make a control circuit 19 to control an amplitude-specifying unit 11, thereby enhancing the rocking angle of electron rays 1 incident upon a sample 2 made of a material such as gold. The value obtained by converting the amplitude of the image on a display screen 17 into the distance on the sample surface is displayed on a displayer 12. The operator drives an input device 20 and stops its operation when the displayed value becomes 2.04 Angstrom that is the pitch of crystal lattices of gold. At this point, since rays transmitted by the sample are vibrating with a width corresponding to the above pitch 2.04 Angstrom , the existence of crystal lattices can be easily known. It is also possible to change the rocking angle of electron rays by controlling a position-specifying unit 10.
申请公布号 JPH0473258(B2) 申请公布日期 1992.11.20
申请号 JP19840224894 申请日期 1984.10.25
申请人 NIPPON ELECTRON OPTICS LAB 发明人 KAI MIKIAKI
分类号 H01J37/26;H01J37/22;H01J37/295 主分类号 H01J37/26
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