| 摘要 |
PURPOSE:To optionally change energy density distribution of laser beam by arranging polymer mirror on laser beam axis through a rotary member and providing suitable pairs of concave mirrors for beam convergence, opposed to faces of the polyon mirror. CONSTITUTION:On the axis C of the laser beam LB introduced in a laser beam machining head 3, the polygon mirror 49 is arranged freely rotatably through the rotary member 27. The suitable pairs of concave mirrors 91, 93 for beam convergence provided freely adjustably in the rotary member 27 and opposed to the faces of polygon mirror 49, is provided in the laser beam machining head 3. Axial symmetrical energy distribution is formed by rotating the rotary member 27 and also, the laser beam machining is executed to a material W to be machined by optically changing this energy distribution during laser beam machining. By this method, accurate machining can be executed. |
