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发明名称
ALIGNMENT METHOD
摘要
申请公布号
EP0494789(A3)
申请公布日期
1992.11.19
申请号
EP19920300213
申请日期
1992.01.10
申请人
CANON KABUSHIKI KAISHA
发明人
KITAOKA, ATSUSHI;SAITOH, KENJI
分类号
G01B11/00;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G03F9/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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