| 摘要 |
PURPOSE:To improve detection sensitivity of an anglular velocity sensor by correcting mismatched vibration of two arms caused by a relative fluctuation in piezoelectric constants, placed positions, etc., of respective driving piezoelectric elements in addition to unbalance in shape of a vibrator. CONSTITUTION:In manufacturing an angle speed sensor exhibiting an approximate tuning fork shape as a whole, while both arms 1,2 are vibrated by respective driving piezoelectric elements 6,7 attached to the two arms 1,2, an output from a detecting piezoelectric element 5 is monitored, while ultraviolet ray hardening adhesive 11 is added to at least one of the arms to adjust vibration mass. |
