发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To ensure improvement of the electrical reliability and high density integration of a semiconductor device. CONSTITUTION:In a semiconductor device having a stacked type capacitive element C, an end surface of part of the surrounidngs of a lower electrode 13 is provided within a range from an opening 12 end provided in a lower insulating film 11 for connection of the lower electrode 13 to a distance corresponding to the thickness of a conductive film constituting the lower electrode 13. Since the area of the end surface of the part of the surroundings of the lower electrode 13 is increased corresponding to the thickness of the insulating film 11, there can be increased the amount of stored electric charges on the capacitive element C at a same flat plane layout area.
申请公布号 JPH04332161(A) 申请公布日期 1992.11.19
申请号 JP19910101088 申请日期 1991.05.07
申请人 HITACHI LTD 发明人 SUWAUCHI NAOKATSU
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L27/04
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