发明名称 INSPECTING APPARATUS OF PATTERN
摘要 PURPOSE:To enable separate inspection of a wiring pattern and a through hole part by a method wherein a reflected light signal from the wiring pattern and a gradation signal of a through hole transmitted modulated light signal are converted into binary- coded images by two independent threshold values respectively. CONSTITUTION:A gradation image (a) of a printed circuit board 101 obtained from an image-sensing device 104 becomes a synthesized signal of a wiring pattern signal and a fringe pattern image of which an image signal level is modulated in each line in a sub-scanning direction in a through hole area by transmissive illumination from below the board 101. After a wiring pattern part is amplified 106 with an ordinary amplification factor and a fringe pattern signal part is amplified 109 with such an amplification factor as to bring about nonlinear amplification, then, they are converted 108, 111 into binary-coded images by independent threshold values respectively. Thereby the binary-coded image c1 of the through hole area is made to be a circular fringe-like pattern being distinct and uniform in the sub-scanning direction, a through hole image can be separated from the wiring pattern part by a simple construction and with fidelity even when the board 101 is thick and wide, and the inspection for width, damage, etc., can be facilitated.
申请公布号 JPH04332853(A) 申请公布日期 1992.11.19
申请号 JP19910102401 申请日期 1991.05.08
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KAWAKAMI HIDEHIKO;MARUYAMA YUJI;YAMAMOTO ATSUHARU;KAWAMURA HIDEAKI
分类号 G01B11/24;G01N21/88;G01N21/956;G03F1/84;G06T1/00;H01L21/66;H05K3/00 主分类号 G01B11/24
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