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发明名称
COATING FILM INSPECTION DEVICE
摘要
申请公布号
JPH04331350(A)
申请公布日期
1992.11.19
申请号
JP19910128273
申请日期
1991.05.02
申请人
MITSUBISHI HEAVY IND LTD
发明人
TSUKAMOTO EIHIKO;EGAWA TSUNEO;YASHIMA MINORU;YOSHIOKA HAJIME;YAMAMOTO TAKAO
分类号
B23Q17/20;G01N3/56
主分类号
B23Q17/20
代理机构
代理人
主权项
地址
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