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发明名称
ETCHING METHOD
摘要
申请公布号
AU2525592(A)
申请公布日期
1992.11.19
申请号
AU19920025255
申请日期
1992.09.21
申请人
BRITISH TELECOMMUNICATIONS PUBLIC LIMITED COMPANY
发明人
KENNETH DUROSE
分类号
H01L21/302;H01L21/20;H01L21/205;H01L21/306;H01L21/308;H01L21/311;H01L21/316
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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