Rotary anode for X-ray tube and method for manufacturing the same.

摘要

A rotary anode for use in an X-ray tube has a graphite substrate plate (1), an intermediate layer (2) made of a metal that does not react with graphite, and an X-ray generating layer (3) provided on the intermediate layer for generating X-rays when elctron impact is applied. The intermediate layer (2) is a rhenium film having an equiaxed grain structure. A method for manufacturing such a rotary anode is proposed. The method has the step of forming, on a graphite substrate plate, an intermediate layer of rhenium by subjecting a metallic chloride to the thermal decomposition CVD process at a substrate temperature of 1200 DEG C or more. The method further has the step of forming, on the intermediate layer, an X-ray generating layer of tungsten or tungsten-rhenium alloy by subjecting a metallic fluoride to the hydrogen reduction thermal CVD process. <IMAGE>