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发明名称
VACUUM PUMP DEVICE
摘要
申请公布号
JPH04330388(A)
申请公布日期
1992.11.18
申请号
JP19910097844
申请日期
1991.04.30
申请人
EBARA CORP
发明人
TSUJIMURA MANABU;NIIMURA YOSHIHIRO
分类号
F04B37/16;F04B39/00
主分类号
F04B37/16
代理机构
代理人
主权项
地址
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