CHARGED PARTICLE EXTRACTION ARRANGEMENT

摘要

An arrangement is described for extracting charged particles which have been emitted from a sample due to the impact of a primary ion beam. The arrangement comprises an electrode arrangement effective to produce an electric potential which is non-linear along a chosen direction of travel of the particles. A system of einzel lenses is effective to match the trajectories of the particles passing from the electrode means to the analyser of a mass spectrometer.