发明名称 |
Movement measuring interferometer and driving system |
摘要 |
A table carrier system of the present invention has a movable table for carrying an object. A displacement detecting system for detecting the displacement of the table by using an interference of light, and a table driving system positions the table according to the detected displacement. If a scaling amount is set in order to change a predetermined displacement range of the table, a reference value of wavelength set in the detecting system is changed in compliance with the scaling amount.
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申请公布号 |
US5164792(A) |
申请公布日期 |
1992.11.17 |
申请号 |
US19900554850 |
申请日期 |
1990.07.20 |
申请人 |
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA |
发明人 |
MATSUI, DECEASED, YUJI;MATSUI, LEGAL REPRESENTATIVE, BY MICHIKO;NONAKA, JUN |
分类号 |
G05D3/12;G01B9/02;G01B11/00;G03F7/20;G05B19/21 |
主分类号 |
G05D3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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