发明名称 |
Vertical heat-treating apparatus |
摘要 |
A vertical heat-treating apparatus which allows effective use of an installation space and improved productivity is disclosed. In this system, a plurality of housings, each accommodated with a vertical reactor, are aligned with each other. A gas feed unit and the like are arranged in front of each housing with a space disposed therebetween for conducting maintenance work. A rail is installed along the rear side of the housings. A boat liner is located on the rail for carrying a boat to the housings. An interface mechanism including a horizontal-vertical conversion handling unit for supplying the boat in a vertical state to the boat liner is disposed near the rail.
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申请公布号 |
US5163832(A) |
申请公布日期 |
1992.11.17 |
申请号 |
US19900605377 |
申请日期 |
1990.10.30 |
申请人 |
TOKYO ELECTRON SAGAMI LIMITED |
发明人 |
ISHII, KATSUMI;WATANABE, SHINGO;KATO, MITSUO |
分类号 |
F27D3/00 |
主分类号 |
F27D3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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