发明名称 Vertical heat-treating apparatus
摘要 A vertical heat-treating apparatus which allows effective use of an installation space and improved productivity is disclosed. In this system, a plurality of housings, each accommodated with a vertical reactor, are aligned with each other. A gas feed unit and the like are arranged in front of each housing with a space disposed therebetween for conducting maintenance work. A rail is installed along the rear side of the housings. A boat liner is located on the rail for carrying a boat to the housings. An interface mechanism including a horizontal-vertical conversion handling unit for supplying the boat in a vertical state to the boat liner is disposed near the rail.
申请公布号 US5163832(A) 申请公布日期 1992.11.17
申请号 US19900605377 申请日期 1990.10.30
申请人 TOKYO ELECTRON SAGAMI LIMITED 发明人 ISHII, KATSUMI;WATANABE, SHINGO;KATO, MITSUO
分类号 F27D3/00 主分类号 F27D3/00
代理机构 代理人
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