| 摘要 |
PURPOSE:To facilitate control by the electromagnetic fields generated by the superconducting current flowing in electrodes without losses by forming the laminated films of copper oxide high-temp. superconductors with a crystalline substrate thereby forming a structure having a superconducting electrode layer. CONSTITUTION:After a Ti-diffused waveguide is formed on a substrate LiNbO3, the thin film 2 of a BaANaBNbCO15-D (where A is 1.4 to 2.5, B is 0.7 to 1.7, C is 4.5 to 6.0, D is <=3.0) phase is formed. The thin film of the superconductor is formed thereon and is worked by wet or dry etching. Namely, thin films 3, 4 of YBa2Cu3OY having the shapes shown in Fig. are formed in the crystalline substrate 2 to constitute the progressive wave electrodes. The Y type waveguide 5 diffused with titanium is formed in the crystalline substrate 2 to provide a mode coupled Y branch path. Further, the phase of luminous flux waves is modulated by adding electric fields between the electrodes from a signal line 7. |
