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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04323828(A)
申请公布日期
1992.11.13
申请号
JP19910092515
申请日期
1991.04.24
申请人
NEC YAMAGATA LTD
发明人
MURASE HIROSHI
分类号
H01L21/027;H01L21/312
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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