发明名称 SIMULATION OF PARTICLE MOVEMENT OF DILUTE GAS
摘要 <p>PURPOSE:To prevent the increase of load for calculation processing even when the shape of boundary between a vapor phase region and a solid phase region is complicated. CONSTITUTION:Data necessary for simulation are inputted (S1), and mean free path and mean free time are calculated (S2) on the basis of the above data. Calculation points wherein neighboring intervals are set to be shorter than or equal to the mean free path are regularly generated in a vapor phase region (S3). After that, particles are generated at random in the vapor phase region by randum numbers (S4), and the movement of particles after the mean free time t (S5) is calculated. Regarding particles, if necessary, collosion calculation is performed for the boundary between the vapor phase region and the solid phase region (S6), and the attribute of particles to the calculation points is determined (S7). After the collision calculation of particles belonging to the same calculation points is performed (S8), processes subsequent to the step 5 are repeated, thereby obtaining the movement of particles.</p>
申请公布号 JPH04324657(A) 申请公布日期 1992.11.13
申请号 JP19910122779 申请日期 1991.04.24
申请人 SHARP CORP 发明人 HAYASHI TOSHIAKI
分类号 H01L21/66;G06F19/00;H01L21/00 主分类号 H01L21/66
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