| 摘要 |
PURPOSE:To obtain a discharge excitation pulse laser oscillation device which hardly decreases in output energy without enhancing a laser gas feeder in feed capacity and where the center position of a laser beam can be kept constant independent of oscillation frequencies. CONSTITUTION:Laser gas is fed between a pair of primary electrodes 1 and 2 provided in parallel with the axial direction of laser rays through a laser gas flow 4a a pre-ionization generating section 10 formed of a hollow dielectric pipe 6 in which an auxiliary electrode 7 is housed is provided to the primary electrode 2 at the upper side of the gas flow 4. A voltage is applied between the primary electrode 32 and the auxiliary electrode 7, whereby gas between the primary electrodes 1 and 2 is pre-ionized by ultraviolet rays emitted from a corona discharge 9 generated on the surface of the dielectric pipe 6. A voltage is applied between the electrodes 1 and 2, whereby a primary discharge takes place between the electrodes 1 and 2 to start oscillating laser rays. |
