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发明名称
FORMING METHOD OF COMPOUND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH04324981(A)
申请公布日期
1992.11.13
申请号
JP19910095503
申请日期
1991.04.25
申请人
HITACHI LTD
发明人
ARAI ISAO
分类号
H01L29/80;H01L21/027
主分类号
H01L29/80
代理机构
代理人
主权项
地址
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Tensioning roller or guide roller has spacer, which is made of plastic or is designed as reinforced plastic component, where spacer includes reinforcement made from aluminum or steel
