摘要 |
<p>PURPOSE:To provide an active device with small secular change in the element output. CONSTITUTION:A first electrode 2, a first ferro-dielectric layer 3 and a second ferro-dielectric layer 4 consisting of copolymeride of VDF and TrFE, a third ferro-dielectric layer 5, and a second electrode 6 are put one over another on an insulative base board 1, and thus an active device is produced. The first and second electrodes 2, 6 will be exfoliated from the ferro-dielectric layers by their piezo-basis vibrations. This results in secular change. Therefore, the first and third ferro-dielectric layers 3, 5 are used as tight attachment layers which should ensure tight attaching of the first and second electrodes 2, 6 strongly to the second ferro-dielectric layer 4. The first ferro-dielectric layer 3 is heated at a temp. over its melting point, while the third ferro-dielectric substance layer 5 heated at a temperature of the melting point of the second ferro- dielectric layer 4 or lower.</p> |