ION IMPLANTATION DEVICE,申请号JP19910122619-传众专利搜索

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发明名称	ION IMPLANTATION DEVICE
摘要
申请公布号	JPH04323819(A)	申请公布日期	1992.11.13
申请号	JP19910122619	申请日期	1991.04.23
申请人	MITSUBISHI ELECTRIC CORP	发明人	KAWASAKI YOJI
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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