摘要 |
<p>A method is disclosed of forming thin uniform micron range and submicron range aberration-resistant and hole-free high-temperature thermally stable metal oxide coatings upon metal, insulating and other substrates, involving the application of a polymer metal complex precursor solution to the substrate and appropriate firing for oxidation of the metal and the coating while burning off all traces of the polymer. Insulating metal oxide coatings on conducting and semiconducting substrates are produced, and, if desired, conducting metal oxide coatings on insulating or semiconducting substrates.</p> |