发明名称 SEMICONDUCTOR TESTING DEVICE
摘要 <p>PURPOSE:To prevent problems from arising in handling high frequencies and small signals and in performing tests for signal transmission speed and high- speed operation, etc. CONSTITUTION:A lead 27 is positioned by a separator 33 on a circuit pattern 25 provided on a substrate 24 correspondingly to the lead 27 of a subject 26 for measurement and is pressed into contact with an elastic holding member 30 and a short conductive path for connection to the lead 27 is used to solve the problem of floating inductance and therefore problems in handling high frequencies and small signals would not arise and problems in performing tests for signal transmission speed and high speed operation, etc., due to the length of the conductive path would not arise. Since the lead 27 is pressed into contact with the circuit pattern 25 by the elastic holding member 30, the pressure contact is ensured and the testing device is easy to handle.</p>
申请公布号 JPH04323576(A) 申请公布日期 1992.11.12
申请号 JP19910091859 申请日期 1991.04.23
申请人 TOSHIBA CORP 发明人 YOSHINAGA MOTOAKI
分类号 G01R31/26;H01L21/66;H01L21/68 主分类号 G01R31/26
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