| 摘要 |
A superconducting delay line utilizes a meandering conductor on a substrate, a thin dielectric coating and a ground plane adjacent the conductor having portions selectively removed so as to control the impedance of the device. In the preferred embodiment, the superconducting microwave delay line is constructed having an epitaxial superconducting conductor and a portion of the ground plane coplanar with the conductor, both formed on the substrate, with the remainder of the ground plane formed by interconnections between the coplanar ground plane. Superconducting epitaxial films may be patterned to provide the conductor and coplanar portions of the ground plane. Metal interconnects disposed on the coplanar portions of the ground plane bridge over the conductor, and the impedance of the device is adjusted by varying the coverage of the conductor by the interconnects. In another embodiment, a single ground plane has sections removed adjacent the conductor to adjust the impedance to substantially 50 ohms. A superconducting epitaxial film is patterned to form a conductor, a dielectric insulator covers the conductor and substrate and a ground plane having removed portions is disposed above the insulator. Superconductive delay lines of this invention may have a 20 GHz bandwidth and a Q exceeding 1,800. |
