MECHANISCHE SONDE ZUR OPTISCHEN MESSUNG ELEKTRISCHER POTENTIALE.

摘要

The mechanical probe comprises a cubic electrooptical crystal (EO) with a pointed edge applied to the measuring point, with an applied layer (D5) for reflection of an optical measuring beam (LA). Pref. the (1,1,1) crystal direction is oriented perpendicular to the surface of the tested IC. The reflective layer (DS) is pref. applied to the side face of the crystal (EO) perpendicular to the surface of the IC, with a second side face at an angle of 45 degrees to this perpendicular side face.