| 摘要 |
PURPOSE:To provide a conductive transparent film having an excellent light transmitting property especially in a wavelength region used for optical communication by forming an indium.tin oxide film on a transparent polyimide film containing a wholly fluorinated polyimide as a main constituent. CONSTITUTION:A conductive transparent film having an excellent light transmitting property in a far IR light region, especially in a wavelength region (0.8-1.7mum) used for optical communication, and having excellent flexibility, heat resistance and electric conductivity is obtained by forming an indium.tin oxide film on a transparent polyimide film containing a wholly fluorinated polyimide having repeating units of formula I (R1 is group of formula II, III or IV; R2 is group of formula V, VI, VII or VIII; Rf is fluorine or perfluoroalkyl; X is O, CO, SO2, etc.,) and containing no hydrogen in the molecular structure, e.g. a polymer having repeating units of formula IV, a polyimide copolymer, or a polyimide mixture as a main constituent by ECR sputtering, while heating at a high temperature, preferably in a range of 200-400 deg.C. |
