| 摘要 |
<p>PURPOSE:To eliminate a problem such as a stop, etc., of a device due to an inclination of a wafer on a wafer supporting arm and to improve an operating efficiency of a light emitting unit by providing auxiliary protrusions on an upper suitable part of the arm. CONSTITUTION:A pair of right and left protrusions 11, 11 extending longitudinally of an arm body 10 are formed on the upper surface of the end of the body 10, and vacuum suction openings 12, 12 are respectively provided at the longitudinal centers of the upper surfaces of the protrusions 11, 11. Further, a plurality of auxiliary supporting protrusions 13, ... aligning at the lateral center are formed on a part of the upper surface of the body 10 toward its base end to the protrusions 11. The height of the protrusion 13 from the upper surface of the body 10 is set equal to or slightly lower than that of the protrusion 11. Thus, a problem that the wafer on the arm is unintentionally inclined, is eliminated, and an operating efficiency of an exposure device can be improved.</p> |
