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发明名称
FORMATION OF IRON NITRIDE THIN FILM
摘要
申请公布号
JPH04323373(A)
申请公布日期
1992.11.12
申请号
JP19910088656
申请日期
1991.04.19
申请人
RICOH CO LTD
发明人
KINOSHITA MIKIO;OTA WASABURO
分类号
C22C29/16;C23C14/06;C23C14/30;C23C14/58
主分类号
C22C29/16
代理机构
代理人
主权项
地址
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