VERFAHREN ZUR HERSTELLUNG VON MINIATURISIERTEN CHEMO- UND BIOSENSORELEMENTEN MIT IONENSELEKTIVER MEMBRAN SOWIE VON TRAEGERN FUER DIESE ELEMENTE

摘要

The invention relates to a process for producing miniaturised chemo and bio-sensor elements with ion-selective diaphragms. To simplify production in the micro range, an aperture (5, 6) starting from the front (3) and tapering toward the rear (4) is made in a thin silicon substrate (1) so that the front and rear are interconnected. A liquid with which the ion-selective diaphragm is formed is poured into the containment (2) thus formed. Vertical ISFETs may also be made on the above principle.