VERFAHREN ZUR ERMITTLUNG DER GROESSE VON PARAMETERN, WELCHE DIE FREQUENZ VON EIGENSCHWINGUNGEN VON MIKROSTRUKTUREN AENDERN

摘要

The invention relates to a process for finding the value of parameters which change the natural oscillation frequency of microstructures, whereby the microstructures have at least one diaphragm secured to their edge. It is the purpose of the invention to provide a process facilitating the measurement of temperatures, expansion, pressures, densities, flow rates, coating rates, internal mechanical stresses and moduli of elasticity on objects to be measured which are not directly accessible during measurement without having to take connections or leads close to the object during measurement. This aim is achieved by finding the characteristic natural oscillation frequency of the microstructures and detecting the value of the parameter with the aid of a calibration curve.