发明名称 A METHOD FOR MANUFACTURING SOLAR CELLS
摘要 <p>A method for manufacturing solar cells, more specifically thin-film solar cells, comprising a substrate on which a multi-layer strcture is formed comprising depositing a layer consisting of a compound of several basic substances, such as copper-indium-diselenide (CuInSe2) or a closely-related compound where copper (Cu) and indium (In) can be replaced totally or partially with silver (Ag) and gallium (Ga) respectively, and where Se can be replaced totally or partially with sulphur (S) and tellerium (Te), and where the concentration of basic substances in said layer varies. The invention is characterized in that the substrate (1) is placed on the inside (11) of a rotatable, generally cylindrical carrier device (10); in that the substrate is heated; in that substance sources (13, 14, 15) are provided for depositing said basic substances on the substrate; and in that one or more of the basic substances is deposited by passing respective sources (14, 15) axially through the cylindrical carrier device (10), by moving the cylindrical carrier device (10) and/or respective sources (14, 15) while rotating the cylindrical carrier device. Particularly intended are thin-film solar cells on which CuInSe2 is deposited.</p>
申请公布号 WO9220103(A1) 申请公布日期 1992.11.12
申请号 WO1992SE00262 申请日期 1992.04.22
申请人 IM INSTITUTET FOER MIKROELEKTRONIK 发明人 HEDSTROEM, JONAS
分类号 C23C14/14;C23C14/06;H01L21/203;H01L21/363;H01L31/032;H01L31/0336;H01L31/04;H01L31/042 主分类号 C23C14/14
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