发明名称 |
Method of making laser ablated oriented films on metal substrates and articles formed thereby. |
摘要 |
<p>Strontium titanate (SrTi03) is deposited on a metallic substrate by laser ablation with a high power pulsed laser to create a deposit layer. The deposit layer can be utilized as a high density capacitor by itself or the deposit layer can be subsequently laser treated with a CO2 laser beam to form a buffer layer such that a layer of superconductor can be later deposited on top of the buffer layer to create a highly conductive superconductor. <IMAGE></p> |
申请公布号 |
EP0512679(A2) |
申请公布日期 |
1992.11.11 |
申请号 |
EP19920302810 |
申请日期 |
1992.03.31 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
SAVKAR, SUDHIR DATTATRAYA;PENNEY, CARL MURRAY |
分类号 |
C23C14/24;H01L39/24 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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