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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE RELATED WITH PSG VAPOR PHASE GROWTH
摘要
申请公布号
JPH04320338(A)
申请公布日期
1992.11.11
申请号
JP19910087959
申请日期
1991.04.19
申请人
FUJITSU LTD
发明人
NISHIO HIDETOSHI
分类号
C23C16/40;H01L21/31;H01L21/316
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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