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发明名称
INPUT CHARACTERISTICS TEST METHOD FOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH04320980(A)
申请公布日期
1992.11.11
申请号
JP19910113842
申请日期
1991.04.19
申请人
FUJITSU LTD
发明人
ADACHI KAZUNOBU
分类号
G01R31/28;H01L21/66;H01L21/82;H01L21/822;H01L27/04
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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