| 摘要 |
A cathode for a laser generator consists of a monolithic body consisting essentially of beryllium and beryllium oxide where the beryllium oxide has a concentration greater than 4%. The monolithic substrate may be comprised of a conductive or nonconductive material. A thin film of beryllium having a controlled amount of BeO is deposited onto the substrate so as to be thick enough to continuously cover the substrate and so as to prevent exposure of the substrate over the life of the cathode. The BeO content is greater than 4.0%. The BeO layer is deposited by a conventional thin film deposition method such as e-beam deposition, i-beam deposition, molecular beam epitaxy or other deposition processes. The BeO may advantageously be deposited using a Be target with a 4.0% BeO content, a Be target in an oxygen atmosphere, or a Be and a BeO target sputtered together.
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