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发明名称
GROWTH METHOD FOR COMPOUND SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPH04318922(A)
申请公布日期
1992.11.10
申请号
JP19910085313
申请日期
1991.04.17
申请人
SUMITOMO ELECTRIC IND LTD
发明人
KIMURA HIROYA;SHIMAZU MITSURU;KOUKADO KOUICHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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