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发明名称
CLEANING DEVICE OR INTERNAL SURFACE OF HYDROTHERMAL FURNACE
摘要
申请公布号
JPH04317489(A)
申请公布日期
1992.11.09
申请号
JP19910080252
申请日期
1991.04.12
申请人
SEIKO ELECTRONIC COMPONENTS LTD
发明人
UCHIDA ATSUSHI
分类号
B08B9/00;C30B7/10
主分类号
B08B9/00
代理机构
代理人
主权项
地址
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