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发明名称
BIAS ECR PLASMA CVD DEVICE
摘要
申请公布号
JPH04318175(A)
申请公布日期
1992.11.09
申请号
JP19910084077
申请日期
1991.04.16
申请人
SONY CORP
发明人
HAYAKAWA HIDEAKI
分类号
C23C16/50;C23C16/511;H01L21/302;H01L21/3065;H01L21/31
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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