SPUTTERING METHOD AND SYSTEM THEREFOR,申请号JP19910173480-传众专利搜索

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发明名称	SPUTTERING METHOD AND SYSTEM THEREFOR
摘要
申请公布号	JPH04318165(A)	申请公布日期	1992.11.09
申请号	JP19910173480	申请日期	1991.04.16
申请人	UBE IND LTD	发明人	KAMATANI YOSHITO
分类号	C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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